Growth of Co-Evaporated Superconducting YBa2Cu3O7-x Thin Films Oxidized By Pure Ozone

B. R. Johnson; K. M. Beauchamp; D. D. Berkley; J-X. Liu; T. Wang

doi:10.1117/12.965146

19 March 1990 Growth of Co-Evaporated Superconducting YBa₂Cu₃O₇-x Thin Films Oxidized By Pure Ozone

B. R. Johnson, K. M. Beauchamp, D. D. Berkley, J-X. Liu, T. Wang

Proceedings Volume 1187, Processing of Films for High Tc Superconducting Electronics; (1990) https://doi.org/10.1117/12.965146
Event: 1989 Microelectronic Integrated Processing Conferences, 1989, Santa Clara, United States

Abstract

Superconducting YBa2Cu3O7-x thin films have been prepared by co-evaporation using an ozone vapor jet to oxidize the films. Films exhibiting zero resistance at 85 K have been fabricated in-situ under high vacuum conditions using substrate temperatures of 700°C without a post-evaporation anneal in oxygen. This process has the advantage that ozone can be made and stored in very pure form, unlike most other commonly used forms of highly reactive oxygen. This makes ozone very useful when a well characterized oxidizing gas is needed for systematic studies of the growth kinetics and oxidation of oxide superconductor films. In this paper, techniques for growing films using ozone are discussed, including the production of pure ozone vapor. Characteristics of the resulting films are also discussed. The superior oxidation efficiency of ozone may facilitate in-situ measurements on fully oxidized superconducting surfaces using techniques such as RHEED and XPS that require nearly UHV conditions. The fabrication in nearly UHV of devices and structures requiring fully oxidized interfaces and surfaces may also be possible using oxidation by ozone.

Citation Download Citation

B. R. Johnson, K. M. Beauchamp, D. D. Berkley, J-X. Liu, and T. Wang "Growth of Co-Evaporated Superconducting YBa₂Cu₃O₇-x Thin Films Oxidized By Pure Ozone", Proc. SPIE 1187, Processing of Films for High Tc Superconducting Electronics, (19 March 1990); https://doi.org/10.1117/12.965146

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