Research on high-precision silicon-based integrated optical temperature sensor

Yimeng Wang; Haowen Shu; Xiuyou Han

doi:10.1117/12.2606526

24 November 2021 Research on high-precision silicon-based integrated optical temperature sensor

Yimeng Wang, Haowen Shu, Xiuyou Han

Proceedings Volume 12062, AOPC 2021: Optoelectronics and Nanophotonics; 120620L (2021) https://doi.org/10.1117/12.2606526
Event: Applied Optics and Photonics China 2021, 2021, Beijing, China

Abstract

Integrated optical temperature sensor nowadays has attracted extensive interests thanks to its merits of high accuracy, electromagnetic immunity, and compact size compared with the traditional solutions. So far, most of the state-of-art integrated optical temperature sensors work by spectrum detection of a resonant cavity, which has certain limitations in terms of response time and cost, and it is difficult to achieve high level integration of the overall system. To solve the above problems, in this paper we use silicon-based integrated micro-ring array technology for high-precision real-time temperature sensing. By constructing a monotonic relationship between the output light intensity of the micro-ring array with the variation of the temperature, rapid and high-precision temperature measurement could be realized. Depending on different practical scenarios, the system can be customized to adapt specific temperature measurement range and resolution. Through the optimized design, the system accuracy could be better than 60mK covering temperature range of 297K~415K, with response time better than 20μs.

Citation Download Citation

Yimeng Wang, Haowen Shu, and Xiuyou Han "Research on high-precision silicon-based integrated optical temperature sensor", Proc. SPIE 12062, AOPC 2021: Optoelectronics and Nanophotonics, 120620L (24 November 2021); https://doi.org/10.1117/12.2606526

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