The research on optical free-form metrology technologies

Xinxue Ma; Jianli Wang; Bin Wang; Xinyue Liu; Hongwen Li

doi:10.1117/12.2604995

13 December 2021 The research on optical free-form metrology technologies

Xinxue Ma, Jianli Wang, Bin Wang, Xinyue Liu, Hongwen Li

Proceedings Volume 12071, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies; 120710W (2021) https://doi.org/10.1117/12.2604995
Event: Tenth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2021), 2021, Chengdu, China

Abstract

With the rapid development of national defense, aerospace and other fields, the demand for high precision and high quality photoelectric products is increasing day by day, and these photoelectric products are gradually developing toward miniaturization. If the optical elements use a free-form, the imaging quality of the optical imaging system can be greatly improved, and the illumination uniformity of the optical illumination system and the transmission efficiency of the information transmission system can also be remarkably improved. With free-form optics becoming the leading representative technology of advanced optical engineering, optical metrology technologies for free-form optics has become the hotspot research of current science-technology development. In this paper, the development of optical metrology technologies, the present situation and the advantages and disadvantages of various metrology technologies are described in detail, which will be of guiding significance for future research on optical metrology technologies for free-form optics.

Citation Download Citation

Xinxue Ma, Jianli Wang, Bin Wang, Xinyue Liu, and Hongwen Li "The research on optical free-form metrology technologies", Proc. SPIE 12071, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies, 120710W (13 December 2021); https://doi.org/10.1117/12.2604995

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