TSP solution for adaptive scanning paths in long-range SPM measurements

Yao-yuan Hu; Wu-le Zhu; Bing-feng Ju

doi:10.1117/12.2605529

15 February 2022 TSP solution for adaptive scanning paths in long-range SPM measurements

Yao-yuan Hu, Wu-le Zhu, Bing-feng Ju

Proceedings Volume 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021); 121660K (2022) https://doi.org/10.1117/12.2605529
Event: Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 2021, Hong Kong, Hong Kong

Abstract

This paper presents a methodology for optimization of the scanning path of iterative adaptive grid generation algorithms in metrological scanning probe microscopes (SPM). This method equips the traditional non-equidistant (adaptive) grid point generation algorithm for the measurement of large smooth optical workpieces with a space-filling curve solution of the traveling salesman problem. We will show that the combined algorithm can reduce the total measurement time efficiently and enables faster surface scanning speed for large industrial workpieces while preserving adequate surface information for performance evaluation after surface reconstruction comparing to contemporary paths. The path generation algorithm also promises necessary information locality and better surface reconstruction completeness. The algorithm is not subject to instrument restrictions and can be implemented in any coordinate measurement systems with xy scanners. Experimental verifications are conducted on a typical parametric surface to show the efficiency of the proposed algorithm.

Citation Download Citation

Yao-yuan Hu, Wu-le Zhu, and Bing-feng Ju "TSP solution for adaptive scanning paths in long-range SPM measurements", Proc. SPIE 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 121660K (15 February 2022); https://doi.org/10.1117/12.2605529

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KEYWORDS

Scanning probe microscopy

Reconstruction algorithms

Metrology

Scanning tunneling microscopy

Algorithm development

Scanners

Scanning probe microscopes

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