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8 July 2022 Geometrical parameters evaluation method of aspheric micro-lens by using white light interferometer
Tong Guo, Xinyang Li
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Proceedings Volume 12282, 2021 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems; 122820N (2022) https://doi.org/10.1117/12.2611253
Event: 2021 International Conference on Optical Instruments and Technology, 2022, Online Only
Abstract
Aspheric micro-lenses provide excellent imaging performance and can effectively reduce the complexity of optical system implementation, but the current detection technology for aspheric micro-lens still faces problems with imperfect measurement parameters and implementation constraints. In this paper, a method for evaluating the geometric parameters of aspheric micro-lenses achieved by white light interferometry technology is proposed, which evaluates the geometric size, roughness, and surface error of aspheric micro-lenses. We have adopted a white light interferometer to measure the aspheric micro-lens and experimentally evaluated the geometrical parameters of the sample, the results proved the feasibility of our proposed method.
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Tong Guo and Xinyang Li "Geometrical parameters evaluation method of aspheric micro-lens by using white light interferometer", Proc. SPIE 12282, 2021 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 122820N (8 July 2022); https://doi.org/10.1117/12.2611253
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KEYWORDS
Aspheric lenses
Interferometers
Optical testing
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