Coarse grating precision displacement measuring system with opto-scanner

Xianghui Yuan

doi:10.1117/12.2294703

1 July 1990 Coarse grating precision displacement measuring system with opto-scanner

Xianghui Yuan

Proceedings Volume 1230, International Conference on Optoelectronic Science and Engineering '90; 12301U (1990) https://doi.org/10.1117/12.2294703
Event: The Marketplace for Industrial Lasers 1990, 1990, Chicago, IL, United States

Abstract

A coarse grating precision displacement measuring system is described in the paper. The system consists of an opto-scanner used as a displacement sensor, a simple optical system, a large pitch reflecting coarse grating (X=0.635mm) and signal processing circuits etc. After describing the opto-scanner briefly, the paper expounds the principle of the system, the schematic circuits and the theory of dynamic phase discriminating and subdivision. Experiment results is satisfactory.

Citation Download Citation

Xianghui Yuan "Coarse grating precision displacement measuring system with opto-scanner", Proc. SPIE 1230, International Conference on Optoelectronic Science and Engineering '90, 12301U (1 July 1990); https://doi.org/10.1117/12.2294703

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