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A new technique of heterodyne interferometer for measuring a displacement is proposed. In this method, a frequency-modulated He-Ne laser is used as the light source of two-wavelength interferometer. The variation of the phase difference which is proportional to the measured displacement is detected. The displacement can be obtained from measurement of the phase variation. Some fundamental experiments have been done.
Bo Wang
"Displacement measurement using optical heterodyne detection", Proc. SPIE 1230, International Conference on Optoelectronic Science and Engineering '90, 12303X (1 July 1990); https://doi.org/10.1117/12.2294778
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Bo Wang, "Displacement measurement using optical heterodyne detection," Proc. SPIE 1230, International Conference on Optoelectronic Science and Engineering '90, 12303X (1 July 1990); https://doi.org/10.1117/12.2294778