Development of a lasers sphere-surface interferometer

Yan Guo

doi:10.1117/12.2294791

1 July 1990 Development of a lasers sphere-surface interferometer

Yan Guo

Proceedings Volume 1230, International Conference on Optoelectronic Science and Engineering '90; 12304A (1990) https://doi.org/10.1117/12.2294791
Event: The Marketplace for Industrial Lasers 1990, 1990, Chicago, IL, United States

Abstract

The laser sphere-surface interferometer is mainly composed of spherical interference system, the interference system for length measuring and electronic counting display.

Citation Download Citation

Yan Guo "Development of a lasers sphere-surface interferometer", Proc. SPIE 1230, International Conference on Optoelectronic Science and Engineering '90, 12304A (1 July 1990); https://doi.org/10.1117/12.2294791

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