The application of improved Fourier transform profilometry

Jian Li

doi:10.1117/12.2294861

1 July 1990 The application of improved Fourier transform profilometry

Jian Li

Proceedings Volume 1230, International Conference on Optoelectronic Science and Engineering '90; 123068 (1990) https://doi.org/10.1117/12.2294861
Event: The Marketplace for Industrial Lasers 1990, 1990, Chicago, IL, United States

Abstract

3-D object shape can be profiled by using optical noncontact measurement methods, such as improved Fourier transform profilometry, etc. These methods restore the object shape through analyzing the continuous phase distribution of an optical structured field that is modulated by the shape. However, in practice, many shapes to be measured have steep height variation and may cause shadows in the modulated phase distribution. Such kind of object shape can not be restored. We propose a method to solve this problem. With this method, the improved Fourier transform profilometry can be used in many areas. This paper describes the theory.

Citation Download Citation

Jian Li "The application of improved Fourier transform profilometry", Proc. SPIE 1230, International Conference on Optoelectronic Science and Engineering '90, 123068 (1 July 1990); https://doi.org/10.1117/12.2294861

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