Hot-spot monitoring of ArF laser at HDC and high energy mode using low reflective beam splitter

Masoud Babaeian; Eric Mason; Jue Wang; Gerald Cox

doi:10.1117/12.2641982

2 December 2022 Hot-spot monitoring of ArF laser at HDC and high energy mode using low reflective beam splitter

Masoud Babaeian, Eric Mason, Jue Wang, Gerald Cox

Proceedings Volume 12300, Laser-Induced Damage in Optical Materials 2022; 1230006 (2022) https://doi.org/10.1117/12.2641982
Event: SPIE Laser Damage, 2022, Rochester, New York, United States

Abstract

We developed a low reflective beam splitter (BS) for hot-spot monitoring of argon-fluoride (ArF) laser, and detected hot-spot in a laser beam profile only at high discharge current and high output power mode.

Conference Presentation

Citation Download Citation

Masoud Babaeian, Eric Mason, Jue Wang, and Gerald Cox "Hot-spot monitoring of ArF laser at HDC and high energy mode using low reflective beam splitter", Proc. SPIE 12300, Laser-Induced Damage in Optical Materials 2022, 1230006 (2 December 2022); https://doi.org/10.1117/12.2641982

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available