Scalable patterning modules for diffractive optics on 300mm substrates

Matthew C. Traub; Myriam Willegems; Sundararajan Thirumalai; Steve Smout; Mohamed Asbahi; Bogumila Kutrzeba-Kotowska; Silvia Lenci; Eleonora Storace

doi:10.1117/12.2649739

16 March 2023 Scalable patterning modules for diffractive optics on 300mm substrates

Matthew C. Traub, Myriam Willegems, Sundararajan Thirumalai, Steve Smout, Mohamed Asbahi, Bogumila Kutrzeba-Kotowska, Silvia Lenci, Eleonora Storace

Author Affiliations +

Proceedings Volume 12449, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) IV; 1244904 (2023) https://doi.org/10.1117/12.2649739
Event: SPIE AR | VR | MR, 2023, San Francisco, California, United States

Abstract

Nano-Imprint lithography (NIL) is a powerful technology for low-cost, large area patterning of complex nano-features, including surface relief gratings and meta-structures for AR optical components. A full layer patterning module that includes a NIL process suited for mass manufacturing requires multiple capabilities: nano-imprint tools, materials, template fabrication, potentially pre- or post-imprint material deposition or removal and extensive metrology. Through its longstanding history in the semiconductor industry, imec has developed advanced mastering, deposition, and etch capabilities that can be paired with NIL process development for fully integrated patterning. In this talk, recent developments in integrated surface relief patterning on transparent 300 mm substrates will be presented. Because the fabrication itself is substrate agnostic, this capability can be transferred to other substrate material available at 300 mm to match the design requirements of a variety of diffractive optical components, such as refractive index tuning.

Conference Presentation

Citation Download Citation

Matthew C. Traub, Myriam Willegems, Sundararajan Thirumalai, Steve Smout, Mohamed Asbahi, Bogumila Kutrzeba-Kotowska, Silvia Lenci, and Eleonora Storace "Scalable patterning modules for diffractive optics on 300mm substrates", Proc. SPIE 12449, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) IV, 1244904 (16 March 2023); https://doi.org/10.1117/12.2649739

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