Ellipsometer development for process monitoring

Emil Agocs; Soraya Zangenehzadeh; Axel Günther; Hans-Hermann Johannes; Bernhard Roth; Wolfgang Kowalsky

doi:10.1117/12.2680286

7 August 2023 Ellipsometer development for process monitoring

Emil Agocs, Soraya Zangenehzadeh, Axel Günther, Hans-Hermann Johannes, Bernhard Roth, Wolfgang Kowalsky

Proceedings Volume 12624, Digital Optical Technologies 2023; 126241M (2023) https://doi.org/10.1117/12.2680286
Event: SPIE Digital Optical Technologies, 2023, Munich, Germany

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Emil Agocs, Soraya Zangenehzadeh, Axel Günther, Hans-Hermann Johannes, Bernhard Roth, and Wolfgang Kowalsky "Ellipsometer development for process monitoring", Proc. SPIE 12624, Digital Optical Technologies 2023, 126241M (7 August 2023); https://doi.org/10.1117/12.2680286

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