Design and fabrication of an electrothermally actuated 2D scanning micromirror

Sreeraj P. Nambiar; Susan Thomas; Shanti Bhattacharya; Enakshi Bhattacharya

doi:10.1117/12.3000919

12 March 2024 Design and fabrication of an electrothermally actuated 2D scanning micromirror

Sreeraj P. Nambiar, Susan Thomas, Shanti Bhattacharya, Enakshi Bhattacharya

Proceedings Volume 12899, MOEMS and Miniaturized Systems XXIII; 128990P (2024) https://doi.org/10.1117/12.3000919
Event: SPIE OPTO, 2024, San Francisco, California, United States

Conference Poster

Abstract

This paper presents the design, fabrication, and testing of a silicon-on-insulator wafer (SOI) based electrothermally actuated MEMS mirror for a micro-endoscope. Finite element analysis (FEA) was conducted using CoventorWare to optimize the design parameters. A fabrication process flow was developed and the process steps were optimized based on the design. The micromirror was fabricated and tested. The results demonstrate the successful design and fabrication of a micromirror suitable for a micro-endoscope application.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Sreeraj P. Nambiar, Susan Thomas, Shanti Bhattacharya, and Enakshi Bhattacharya "Design and fabrication of an electrothermally actuated 2D scanning micromirror", Proc. SPIE 12899, MOEMS and Miniaturized Systems XXIII, 128990P (12 March 2024); https://doi.org/10.1117/12.3000919

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