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The quality of the optical element surface directly affects the performance of the element, and the inspection and evaluation of the optical element surface is necessary for the manufacturing and processing of optical elements. Optical Coherence Tomography (OCT) is a new type of optical inspection technology, which uses the low coherence characteristics of broadband light sources to obtain the position information in the depth direction of the sample, and has the advantages of non-contact, non-damaging and high resolution. In this paper, a convex lens with a diameter of 25.4 mm was inspected using an 850 nm band fiber optic type spectral domain OCT inspection system. The inspection system mainly consists of a spectral domain OCT inspection system and a scanning device. The inspection data were then fitted to the surface using the least squares method. The PV is 0.97 μm and the root mean square residual is 0.14 μm. This experiment verifies the feasibility of OCT in the field of optical element surface inspection and provides a technical accumulation for the further development of high precision inspection of optical element surface using OCT.
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