Design of a reusable VCSEL sensor chip integrated with multilayer grating

Wenhui Jiang; Xiaoqing Lv; Lei Bao; Pengying Chang; Liangchen Hu; Yiyang Xie

doi:10.1117/12.3015046

4 March 2024 Design of a reusable VCSEL sensor chip integrated with multilayer grating

Wenhui Jiang, Xiaoqing Lv, Lei Bao, Pengying Chang, Liangchen Hu, Yiyang Xie

Proceedings Volume 12981, Ninth International Symposium on Sensors, Mechatronics, and Automation System (ISSMAS 2023); 1298107 (2024) https://doi.org/10.1117/12.3015046
Event: 9th International Symposium on Sensors, Mechatronics, and Automation (ISSMAS 2023), 2023, Nanjing, China

Abstract

Optical biosensors provide important opportunities and have broad application prospects in biomedicine, disease diagnosis, pharmaceutical, and other fields. In this paper, a reusable VCSEL (vertical cavity surface emitting laser) biosensor chip integrated with a multilayer nano grating structure is introduced. The selected laser wavelength is 850 nm, and the overall device adopts semiconductor laser packaging technology to achieve high integration of light source and multilayer nano grating. A small plasmonic biosensor platform based on hyperbolic metamaterial (HMMs) Au/Si₃N₄ is studied using the grating coupling principle. The transmission peak is adjusted to the wavelength of 850 nm by changing the nano grating parameters so as to improve the sensitivity of the sensor chip. However, the high cost of the sensor chip which is based on noble metal nanostructure and precision technology hinders its further application. In this paper, we propose to grow and remove parylene film on the sensor chip to realize the reuse of biosensors.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Wenhui Jiang, Xiaoqing Lv, Lei Bao, Pengying Chang, Liangchen Hu, and Yiyang Xie "Design of a reusable VCSEL sensor chip integrated with multilayer grating", Proc. SPIE 12981, Ninth International Symposium on Sensors, Mechatronics, and Automation System (ISSMAS 2023), 1298107 (4 March 2024); https://doi.org/10.1117/12.3015046

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