Principle and characteristic analysis of electric field sensor

Wenjing Zheng; Zhiyong Liu; Rong Wang

doi:10.1117/12.3015100

4 March 2024 Principle and characteristic analysis of electric field sensor

Wenjing Zheng, Zhiyong Liu, Rong Wang

Proceedings Volume 12981, Ninth International Symposium on Sensors, Mechatronics, and Automation System (ISSMAS 2023); 1298113 (2024) https://doi.org/10.1117/12.3015100
Event: 9th International Symposium on Sensors, Mechatronics, and Automation (ISSMAS 2023), 2023, Nanjing, China

Abstract

This paper introduces the typical principles of electric field measurement systems, compares the corresponding measurement parameters, analyzes the advantages and disadvantages of electric field sensors. As the development trend of micro sensors, the different designs of electric field sensors based on MEMS technology are introduced. Benefit from the Wheatstone bridge method which can measure resistance accurately, the frequency range of the electric field sensor is DC-100kHz, the electric field range is 12.7-1570 kV/m, and the sensitivity is 7.86mV/(kV/cm).

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Wenjing Zheng, Zhiyong Liu, and Rong Wang "Principle and characteristic analysis of electric field sensor", Proc. SPIE 12981, Ninth International Symposium on Sensors, Mechatronics, and Automation System (ISSMAS 2023), 1298113 (4 March 2024); https://doi.org/10.1117/12.3015100

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