Measuring the thickness of thin metal films using an eddy current software and hardware complex

Alexander Katasonov; Vladimir Malikov; Sergey Voinash; Irina Vornacheva; Ramil Zagidullin; Stanislav Akhmetshin

doi:10.1117/12.3016516

19 January 2024 Measuring the thickness of thin metal films using an eddy current software and hardware complex

Alexander Katasonov, Vladimir Malikov, Sergey Voinash, Irina Vornacheva, Ramil Zagidullin, Stanislav Akhmetshin

Proceedings Volume 12986, Third International Scientific and Practical Symposium on Materials Science and Technology (MST-III 2023); 1298608 (2024) https://doi.org/10.1117/12.3016516
Event: Third International Scientific and Practical Symposium on Materials Science and Technology (MST-III 2023), 2023, Dushanbe, Tajikistan

Abstract

The design of a miniature eddy current transducer has been developed and improved, a hardware and software complex has been constructed, and methods for testing thin metal films have been presented. The results of measurements using the developed eddy current transducer operating under the control of a hardware and software complex are presented. The possibility of using the developed system to study the thickness of thin metal films is demonstrated. The dependences of the amplitude of the output signal of the ETC on the frequency of the exciting signal when scanning a thin copper film were obtained. A dependence has been compiled demonstrating the relationship between film thickness and electrical conductivity.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Alexander Katasonov, Vladimir Malikov, Sergey Voinash, Irina Vornacheva, Ramil Zagidullin, and Stanislav Akhmetshin "Measuring the thickness of thin metal films using an eddy current software and hardware complex", Proc. SPIE 12986, Third International Scientific and Practical Symposium on Materials Science and Technology (MST-III 2023), 1298608 (19 January 2024); https://doi.org/10.1117/12.3016516

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