Whole and local phase modulation measurement of SLM with common-path phase-shifting interferometry

Fuzhong Bai; Zhiwen Zhao; Jiayi Chen

doi:10.1117/12.3014457

30 April 2024 Whole and local phase modulation measurement of SLM with common-path phase-shifting interferometry

Fuzhong Bai, Zhiwen Zhao, Jiayi Chen

Proceedings Volume 13153, Sixth Conference on Frontiers in Optical Imaging and Technology: Novel Technologies in Optical Systems; 131530E (2024) https://doi.org/10.1117/12.3014457
Event: Sixth Conference on Frontiers in Optical Imaging Technology and Applications (FOI2023), 2023, Nanjing, JS, China

Abstract

Based on the polarization splitting principle of the only-phase liquid crystal device, a common path phase-shifting interferometry is built to measure the whole and local phase modulation characteristics of a liquid-crystal spatial light modulator (LC-SLM) with high spatial resolution and high gray level. In this technique, the SLM is not only a device to be measured but also an optical component that is used to splitting the incident linearly polarized light. A specially designed control grayscale image is loaded into the SLM, and then several frames of phase-shifted interferograms are recorded. The wavefront phase can be calculated by using the phase-shifting algorithm. Through changing the loaded images, the phase modulation curve is obtained. The experimental steps and results are presented in the paper, and the uniformity of local phase modulation is also evaluated. The proposed method has stable measuring results and has the advantage of simple principle and convenient operation.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Fuzhong Bai, Zhiwen Zhao, and Jiayi Chen "Whole and local phase modulation measurement of SLM with common-path phase-shifting interferometry", Proc. SPIE 13153, Sixth Conference on Frontiers in Optical Imaging and Technology: Novel Technologies in Optical Systems, 131530E (30 April 2024); https://doi.org/10.1117/12.3014457

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KEYWORDS

Phase modulation

Spatial light modulators

Interferograms

Phase interferometry

Wavefronts

Liquid crystals

Phase shifts

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