Interferometer for testing aspheric surfaces with electron-beam computer-generated holograms

Takashi Gemma; Masayuki Hideshima; Makoto Taya; Nobuko Watanabe

doi:10.1117/12.51053

1 January 1991 Interferometer for testing aspheric surfaces with electron-beam computer-generated holograms

Takashi Gemma, Masayuki Hideshima, Makoto Taya, Nobuko Watanabe

Proceedings Volume 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection; (1991) https://doi.org/10.1117/12.51053
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

This paper describes an interferometer system for testing aspheric surfaces with computer-generated holograms (CGHs). A CGH written by electron-beams achieves the precise testing of a wide range of aspheric surfaces. A new algorithm removes the error caused by misalignment of a CGH and a testing surface. This system can test aspheric surfaces with accuracy 2/10 (P-V value) and repeatability /5OO (RMS value).

Citation Download Citation

Takashi Gemma, Masayuki Hideshima, Makoto Taya, and Nobuko Watanabe "Interferometer for testing aspheric surfaces with electron-beam computer-generated holograms", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); https://doi.org/10.1117/12.51053

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