Fabrication techniques for high-resolution lens assemblies

Anees Ahmad

doi:10.1117/12.22883

1 November 1990 Fabrication techniques for high-resolution lens assemblies

Anees Ahmad

Proceedings Volume 1335, Dimensional Stability; (1990) https://doi.org/10.1117/12.22883
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

This paper presents the fabrication and assembly techniques for high resolution lens assemblies such as the projection lenses used for submicron photolithography. In order to meet the stringent precision and dimensional stability requirements for such lens assemblies the aluminum lens cells are machined and heat treated in several steps to achieve the required accuracies. Special optical tools and mechanical gages are then used to assemble the lenses into the cells on an airbearing table. 1.

Citation Download Citation

Anees Ahmad "Fabrication techniques for high-resolution lens assemblies", Proc. SPIE 1335, Dimensional Stability, (1 November 1990); https://doi.org/10.1117/12.22883

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