Deposition of Y-Ba-Cu-O films on silicon subrates

Alex G. Akimov; S. A. Kozikov; V. G. Krigel; Anatole N. Khodan; Victor N. Bagratashvili

doi:10.1117/12.23713

1 October 1990 Deposition of Y-Ba-Cu-O films on silicon subrates

Alex G. Akimov, S. A. Kozikov, V. G. Krigel, Anatole N. Khodan, Victor N. Bagratashvili

Proceedings Volume 1352, 1st Intl School on Laser Surface Microprocessing; (1990) https://doi.org/10.1117/12.23713
Event: International School on Laser Surface Microprocessing, 1989, Tashkent, Uzbekistan

Abstract

This work was aimed at studies into the basic physic—chemical processes govern ing the interaction between the Y203-4BaO-6CuO oxidefilm being deposited and the silicon substrate and the chemical stability of the Y Ba Cu 0 film on the surface 1 2 •3 7—x of S13N4 layer deposited on silicon.

Citation Download Citation

Alex G. Akimov, S. A. Kozikov, V. G. Krigel, Anatole N. Khodan, and Victor N. Bagratashvili "Deposition of Y-Ba-Cu-O films on silicon subrates", Proc. SPIE 1352, 1st Intl School on Laser Surface Microprocessing, (1 October 1990); https://doi.org/10.1117/12.23713

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