UV laser photolysis of Mo(CO)6 and molybdenum film deposition

Victor N. Bagratashvili; Alexander V. Evseev; Sergey Valentinov Kamayev; Michael A. Markov

doi:10.1117/12.23703

1 October 1990 UV laser photolysis of Mo(CO)6 and molybdenum film deposition

Victor N. Bagratashvili, Alexander V. Evseev, Sergey Valentinov Kamayev, Michael A. Markov

Proceedings Volume 1352, 1st Intl School on Laser Surface Microprocessing; (1990) https://doi.org/10.1117/12.23703
Event: International School on Laser Surface Microprocessing, 1989, Tashkent, Uzbekistan

Abstract

Abstract not available.

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Victor N. Bagratashvili, Alexander V. Evseev, Sergey Valentinov Kamayev, and Michael A. Markov "UV laser photolysis of Mo(CO)6 and molybdenum film deposition", Proc. SPIE 1352, 1st Intl School on Laser Surface Microprocessing, (1 October 1990); https://doi.org/10.1117/12.23703

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