Research sputter cluster tool

Peter J. Clarke

doi:10.1117/12.48955

1 March 1991 Research sputter cluster tool

Peter J. Clarke

Proceedings Volume 1392, Advanced Techniques for Integrated Circuit Processing; (1991) https://doi.org/10.1117/12.48955
Event: Processing Integration, 1990, Santa Clara, CA, United States

Abstract

The Robotic Cluster Tool was developed for robotic handling and processing of seraiconductor wafers. The processing chanbers are clustered about a central robot which serves the load lock three independent processing chambers and four inspection chautbers joined to the main chamber. The system is under centralized computer control which means the niotion of the robot and associated thin filra processes are all controlled by a conurton computer.

Citation Download Citation

Peter J. Clarke "Research sputter cluster tool", Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); https://doi.org/10.1117/12.48955

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