Thomson scattering diagnostics of discharge plasmas in an excimer laser

H. Yamakoshi; Motoko Kato; Y. Kubo; H. Enokizono; Kenji Uchino; Katsunori Muraoka; A. Takahashi; Mitsuo Maeda

doi:10.1117/12.25951

1 February 1991 Thomson scattering diagnostics of discharge plasmas in an excimer laser

H. Yamakoshi, Motoko Kato, Y. Kubo, H. Enokizono, Kenji Uchino, Katsunori Muraoka, A. Takahashi, Mitsuo Maeda

Proceedings Volume 1397, 8th Intl Symp on Gas Flow and Chemical Lasers; (1991) https://doi.org/10.1117/12.25951
Event: Eighth International Symposium on Gas-Flow and Chemical Lasers, 1990, Madrid, Spain

Abstract

The electron-velocity distribution function of the discharge plasma in a rare gas halide excimer laser was diagnosed by the Thomson scattering method. The measured electron-velocity distribution function shows that the predicted value by the calculation is accurate. Those results assure that the calculation method which is based on the kinetic calculation using the circuit equations, the Boltzmann equation and the rate equations is effective in the excimer laser simulation.

Citation Download Citation

H. Yamakoshi, Motoko Kato, Y. Kubo, H. Enokizono, Kenji Uchino, Katsunori Muraoka, A. Takahashi, and Mitsuo Maeda "Thomson scattering diagnostics of discharge plasmas in an excimer laser", Proc. SPIE 1397, 8th Intl Symp on Gas Flow and Chemical Lasers, (1 February 1991); https://doi.org/10.1117/12.25951

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