Resonant and nonresonant ionization in sputtered initiated laser ionization spectrometry

George J. Havrilla; Mark Nicholas; Scott R. Bryan; J. Gary Pruett

doi:10.1117/12.44226

1 July 1991 Resonant and nonresonant ionization in sputtered initiated laser ionization spectrometry

George J. Havrilla, Mark Nicholas, Scott R. Bryan, J. Gary Pruett

Proceedings Volume 1435, Optical Methods for Ultrasensitive Detection and Analysis: Techniques and Applications; (1991) https://doi.org/10.1117/12.44226
Event: Optics, Electro-Optics, and Laser Applications in Science and Engineering, 1991, Los Angeles, CA, United States

Abstract

Resonant and nonresonant laser ionization of sputtered neutral atoms are compared for silver/gold alloys and silica/silicon wafer implants. The results obtained from these two different ionization schemes represent complementary information on the sputtered species. There are chemical and photofragmentation effects that must be considered for quantitative determinations of the surface and sub-surface species. Both ionization schemes are necessary to obtain complete information on the sample.

Citation Download Citation

George J. Havrilla, Mark Nicholas, Scott R. Bryan, and J. Gary Pruett "Resonant and nonresonant ionization in sputtered initiated laser ionization spectrometry", Proc. SPIE 1435, Optical Methods for Ultrasensitive Detection and Analysis: Techniques and Applications, (1 July 1991); https://doi.org/10.1117/12.44226

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