Multishot ablation of thin films: sensitive detection of film/substrate transition by shockwave monitoring

Hans Eckard Hunger; Stefan Petzoldt; H. Pietsch; Juergen Reif; Eckart Matthias

doi:10.1117/12.57223

1 June 1991 Multishot ablation of thin films: sensitive detection of film/substrate transition by shockwave monitoring

Hans Eckard Hunger, Stefan Petzoldt, H. Pietsch, Juergen Reif, Eckart Matthias

Proceedings Volume 1441, Laser-Induced Damage in Optical Materials: 1990; (1991) https://doi.org/10.1117/12.57223
Event: Laser-Induced Damage in Optical Materials: 1990, 1990, Boulder, CO, United States

Abstract

During multishot ablation with 248 nm excimer laser pulses for each single laser shot the shock wave emerging from the ablated material was monitored by the acoustic mirage effect. The shockwave parameters turned out to depend sensitively on the nature of the ablated material. In particular during ablation of a polymeric film/Si02/Si multilayer system distinct changes in the deflection signal were found when the ablation was driven through the interface between layers. Inspection by optical microscopy and depth profil ing was used as cross check. 1.

Citation Download Citation

Hans Eckard Hunger, Stefan Petzoldt, H. Pietsch, Juergen Reif, and Eckart Matthias "Multishot ablation of thin films: sensitive detection of film/substrate transition by shockwave monitoring", Proc. SPIE 1441, Laser-Induced Damage in Optical Materials: 1990, (1 June 1991); https://doi.org/10.1117/12.57223

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