High-average-power narrow-band KrF excimer laser

Osamu Wakabayashi; Masahiko Kowaka; Yukio Kobayashi

doi:10.1117/12.44820

1 July 1991 High-average-power narrow-band KrF excimer laser

Osamu Wakabayashi, Masahiko Kowaka, Yukio Kobayashi

Proceedings Volume 1463, Optical/Laser Microlithography IV; (1991) https://doi.org/10.1117/12.44820
Event: Microlithography, 1991, San Jose, CA, United States

Abstract

The conventional line-narrowing methods employed by narrow-band KrF excimer lasers are (1) intracavity etalons and (2) a Littrow grating with beam expansion. They have the following problems in high average power operation: (a) short lifetime of the etalons and large wavelength drift and large line-width change (the etalons method), or (b) low output power and short lifetime of electrodes (the grating method). To solve there problems, a hybrid method consisting of two prism beam expanders, an etalon and a Littrow grating, it proposed. These prism beam expanders decrease the light intensity on the etalon, so that the lifetime of the etalon is increased drastically, the passive wavelength drift is minimized, and the wavelength is adjusted quickly. By employing this system, average power of more than 8 W, line-width of less than 2.5 pm(FWHM), and long-term wavelength stability of less than +-0.5 pm were achieved.

Citation Download Citation

Osamu Wakabayashi, Masahiko Kowaka, and Yukio Kobayashi "High-average-power narrow-band KrF excimer laser", Proc. SPIE 1463, Optical/Laser Microlithography IV, (1 July 1991); https://doi.org/10.1117/12.44820

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available