Process-dependent kinoform performance

J. Allen Cox; Bernard S. Fritz; Thomas R. Werner

doi:10.1117/12.47032

1 September 1991 Process-dependent kinoform performance

J. Allen Cox, Bernard S. Fritz, Thomas R. Werner

Proceedings Volume 1507, Holographic Optics III: Principles and Applications; (1991) https://doi.org/10.1117/12.47032
Event: ECO4 (The Hague '91), 1991, The Hague, Netherlands

Abstract

Results are presented of an on-going experimental program to characterize the effects of processing errors on kinoform performance. Diffraction efficiency and modulation transfer function data are given for various types of processing errors present in staircase kinoforms of a f/10 Fresnel phase lens having two and four levels. Processing errors include etch depth, linewidth, and mask alignment. Processing errors, especially mask alignment, are shown to have the greatest impact on diffraction efficiency and very little effect on image quality.

Citation Download Citation

J. Allen Cox, Bernard S. Fritz, and Thomas R. Werner "Process-dependent kinoform performance", Proc. SPIE 1507, Holographic Optics III: Principles and Applications, (1 September 1991); https://doi.org/10.1117/12.47032

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