Preparation of thin superconducting YBCO films by ion-beam mixing

Xiang Jun Fan; You Gui Pen; Huai Xi Guo; Hong Tao Li; Chang Liu; Chang Zhong Jiang; Zhi Lin Pen

doi:10.1117/12.47209

1 November 1991 Preparation of thin superconducting YBCO films by ion-beam mixing

Xiang Jun Fan, You Gui Pen, Huai Xi Guo, Hong Tao Li, Chang Liu, Chang Zhong Jiang, Zhi Lin Pen

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47209
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

In this paper, we present a new method using ion beam mixing to prepare thin superconducting YBCO films. In the high-low temperature target room, multilayered Y-Ba-Cu films were prepared by multi-evaporation. Then the multilayered films were mixed by ion beam. After annealing, superconducting films with zero resistance temperature at 80 K can be obtained. The constituent determined by electron probe microanalysis (EPMA) is close to the 1-2-3 case. X-ray diffraction patterns show that the structure of the film is orthorhombic having an obvious c-axis orientation perpendicular to the film surface like the epitaxial films.

Citation Download Citation

Xiang Jun Fan, You Gui Pen, Huai Xi Guo, Hong Tao Li, Chang Liu, Chang Zhong Jiang, and Zhi Lin Pen "Preparation of thin superconducting YBCO films by ion-beam mixing", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47209

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