Temperature dependence of resistance of diamond film synthesized by microwave plasma CVD

Bangchao Yang; Li Gou; Yu Ming Jia; Junguo Ran; Changqiong Zheng; Xia Tang

doi:10.1117/12.47249

1 November 1991 Temperature dependence of resistance of diamond film synthesized by microwave plasma CVD

Bangchao Yang, Li Gou, Yu Ming Jia, Junguo Ran, Changqiong Zheng, Xia Tang

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47249
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

Diamond has many excellent properties, such as the greatest hardness (10000 kg/mm²), high thermal conductivity (5 times that of Copper at 20 degree(s)C), wide energy gap (5.5 eV), good chemical stability, etc. But for a long time, the shape and the high cost of diamond made by high-pressure, high-temperature method severely limit the application of the diamond in electronics and optics. Since the diamond film was synthesized, people began to study further the properties of the diamond film. It is expected to be a new kind of function material. This is a report of the temperature dependence of the resistance of the diamond film. The authors also attempted to prepare the thermistor made of polycrystal diamond film on silicon substrate.

Citation Download Citation

Bangchao Yang, Li Gou, Yu Ming Jia, Junguo Ran, Changqiong Zheng, and Xia Tang "Temperature dependence of resistance of diamond film synthesized by microwave plasma CVD", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47249

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available