Three-dimensional automatic precision measurement system by liquid-crystal plate on moire topography

Yasuhiko Arai; Shunsuke Yokozeki; Tomoharu Yamada

doi:10.1117/12.57496

1 December 1991 Three-dimensional automatic precision measurement system by liquid-crystal plate on moiré topography

Yasuhiko Arai, Shunsuke Yokozeki, Tomoharu Yamada

Proceedings Volume 1554, Second International Conference on Photomechanics and Speckle Metrology; (1991) https://doi.org/10.1117/12.57496
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Moiré topography method is a well-known noncontacting 3-D measurement method. At present, the automatic 3-D measurement by moiré topography has been required since the method was frequently applied to the engineering and medical fields. Still the method has not been automated. In particular, it is difficult to automate the grid illumination type of moiré topography, which is operated easier than the grid projection type of moiré-topography method, because the grid illumination type is constructed only by one grating. In this study, a new 3-D precision measurement system by using the liquid crystal plate on the grid illumination type is proposed. In this system, the phase of moiré fringes is measured by the fringe scanning method, sequentially the fringe order number of moiré fringes is detected by the light-section method, and finally the profile of the measured object is calculated numerically from the phase and the fringe order number of moiré fringes by a micro-computer. The experimental results show that the accuracy of the system is about 1/60 fringe and that the measurement of the plane with steps can be automatically performed.

Citation Download Citation

Yasuhiko Arai, Shunsuke Yokozeki, and Tomoharu Yamada "Three-dimensional automatic precision measurement system by liquid-crystal plate on moiré topography", Proc. SPIE 1554, Second International Conference on Photomechanics and Speckle Metrology, (1 December 1991); https://doi.org/10.1117/12.57496

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