Fast linear measurement and surface metrology techniques

G. D. Pitt

doi:10.1117/12.57759

1 April 1992 Fast linear measurement and surface metrology techniques

G. D. Pitt

Proceedings Volume 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level; (1992) https://doi.org/10.1117/12.57759
Event: SIRA, 1991, London, United Kingdom

Abstract

Calibration of machine tools and co-ordinate measurement machines can be a lengthy business. New developments, based on linear interterometry, and novel software methods have drastically reduced the time required for machine calibrations and installation acceptances.

Citation Download Citation

G. D. Pitt "Fast linear measurement and surface metrology techniques", Proc. SPIE 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level, (1 April 1992); https://doi.org/10.1117/12.57759

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