Surface characterisation via optical diffraction

Daniel I. Mansfield

doi:10.1117/12.57758

1 April 1992 Surface characterisation via optical diffraction

Daniel I. Mansfield

Proceedings Volume 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level; (1992) https://doi.org/10.1117/12.57758
Event: SIRA, 1991, London, United Kingdom

Abstract

Through the consideration of a surface as a reflective phase grating, this paper establishes the various relationships between the statistical parameters of the surface topography and the far- field diffraction pattern. These relationships have been incorporated into Talyfine, a new measuring instrument designed primarily for the measurement of flats and cylinders. The performance of this instrument is compared against established stylus-based surface texture measuring instruments, Talystep and Form Talysurf.

Citation Download Citation

Daniel I. Mansfield "Surface characterisation via optical diffraction", Proc. SPIE 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level, (1 April 1992); https://doi.org/10.1117/12.57758

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