Characterization and performance of advanced i-line photoresists for 0.5-micron CMOS technology

Jeffrey R. Johnson; Gregory J. Stagaman; John C. Sardella; Charles R. Spinner III; Fu-Tai Liou

doi:10.1117/12.130315

1 June 1992 Characterization and performance of advanced i-line photoresists for 0.5-micron CMOS technology

Jeffrey R. Johnson, Gregory J. Stagaman, John C. Sardella, Charles R. Spinner III, Fu-Tai Liou

Proceedings Volume 1674, Optical/Laser Microlithography V; (1992) https://doi.org/10.1117/12.130315
Event: Microlithography '92, 1992, San Jose, CA, United States

Abstract

An evaluation procedure for advanced I-line photoresists is presented. The evaluation is comprehensive in nature, including manufacturing and quality requirements as well as the usual patterning performance tests. The evaluation is divided into three general categories: Performance, Manufacturability, and Materials. These categories include a total of 23 individual performance tests and 15 evaluation criteria. A scoring method is described which assigns a numerical rating to the resist performance. Weighting constants contained in this procedure can be adjusted to vary the emphasis on particular measures of the photoresist performance.

Citation Download Citation

Jeffrey R. Johnson, Gregory J. Stagaman, John C. Sardella, Charles R. Spinner III, and Fu-Tai Liou "Characterization and performance of advanced i-line photoresists for 0.5-micron CMOS technology", Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); https://doi.org/10.1117/12.130315

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available