W/C multilayers deposited on plastic films

Shoji Seki; Tsukasa Miyazaki; Motoshige Tatsumi; Koujun Yamashita

doi:10.1117/12.140565

21 January 1993 W/C multilayers deposited on plastic films

Shoji Seki, Tsukasa Miyazaki, Motoshige Tatsumi, Koujun Yamashita

Proceedings Volume 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography; (1993) https://doi.org/10.1117/12.140565
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

W/C multilayers were deposited on plastic films, which had thin thickness and light weight. TEM images showed the surface roughness of the plastic films and the boundary roughness of the multilayers. X-ray reflectivities were measured at wavelengths of 0.154 nm, 0.834 nm, and 0.3 to 0.7 nm. The boundary roughness values of the multilayers deposited on a polyimide film and a Si wafer were estimated to be 1.2 nm and 0.7 nm, respectively.

Citation Download Citation

Shoji Seki, Tsukasa Miyazaki, Motoshige Tatsumi, and Koujun Yamashita "W/C multilayers deposited on plastic films", Proc. SPIE 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, (21 January 1993); https://doi.org/10.1117/12.140565

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