Scan system for the subangstrom STEM

Shengyang Ruan; Oscar H. Kapp

doi:10.1117/12.130963

1 August 1992 Scan system for the subangstrom STEM

Shengyang Ruan, Oscar H. Kapp

Proceedings Volume 1778, Imaging Technologies and Applications; (1992) https://doi.org/10.1117/12.130963
Event: Optical Engineering Midwest 1992, 1992, Chicago, IL, United States

Abstract

A computer-controlled scan system has been completed for a sub-angstrom resolution STEM (scanning transmission electron microscope). Controlled by a PC-AT, this system is able to control beam scan, unscan, alignment, and correction of aberration. Using this system, the raster size, shape, rotation angle, and raster position may be controlled by subroutines for image generation/transformation. Computer control allows the simultaneous setting of multiple parameters allowing easy operation of the microscope and saving experimenter time.

Citation Download Citation

Shengyang Ruan and Oscar H. Kapp "Scan system for the subangstrom STEM", Proc. SPIE 1778, Imaging Technologies and Applications, (1 August 1992); https://doi.org/10.1117/12.130963

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