Laser automatic thick-film element photoetching system

Tao-Lue Chen; Qirong Lu; Shaohe Chen; Ximing Deng

doi:10.1117/12.144171

11 May 1993 Laser automatic thick-film element photoetching system

Tao-Lue Chen, Qirong Lu, Shaohe Chen, Ximing Deng

Proceedings Volume 1979, 1992 International Conference on Lasers and Optoelectronics; (1993) https://doi.org/10.1117/12.144171
Event: 1992 International Conference on Lasers and Optoelectronics, 1992, Bejing, China

Abstract

By using micro-computer controlled stepmotor, we made the laser beam scan in accordance with the pattern of the thick-film element, and measured its resistance at the same time. The resistance value precision can reach 10^-4.

Citation Download Citation

Tao-Lue Chen, Qirong Lu, Shaohe Chen, and Ximing Deng "Laser automatic thick-film element photoetching system", Proc. SPIE 1979, 1992 International Conference on Lasers and Optoelectronics, (11 May 1993); https://doi.org/10.1117/12.144171

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