Photoluminescence characterization of silicon subjected to various industrial treatments

Mikhail Ya. Valakh; Galina Yu. Rudko; N. I. Shakhraychuk

doi:10.1117/12.191971

31 October 1994 Photoluminescence characterization of silicon subjected to various industrial treatments

Mikhail Ya. Valakh, Galina Yu. Rudko, N. I. Shakhraychuk

Proceedings Volume 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics; (1994) https://doi.org/10.1117/12.191971
Event: Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics: International Workshop, 1993, Kiev, Ukraine

Abstract

Photoluminescence investigations of silicon subjected to such industrial treatments as implantation, high temperature postimplantation annealing, treatment in high frequency discharge plasma, as well as the prolonged thermal annealing with the formation of thermal donors were carried out. It was shown that photoluminescence can be used for direct observation of the implanted impurity activation under various postimplantation treatments. Photoluminescence also proved to be useful for indirect control of thermal donors generation in Si:Ge.

Citation Download Citation

Mikhail Ya. Valakh, Galina Yu. Rudko, and N. I. Shakhraychuk "Photoluminescence characterization of silicon subjected to various industrial treatments", Proc. SPIE 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (31 October 1994); https://doi.org/10.1117/12.191971

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available