Preparation and microstructure of epitaxial multilayers with infinite layer thin films

Toshifumi Satoh; Hideaki Adachi; Yoko Ichikawa; Kentaro Setsune; Kiyotaka Wasa

doi:10.1117/12.179180

29 June 1994 Preparation and microstructure of epitaxial multilayers with infinite layer thin films

Toshifumi Satoh, Hideaki Adachi, Yoko Ichikawa, Kentaro Setsune, Kiyotaka Wasa

Proceedings Volume 2157, Superconducting Superlattices and Multilayers; (1994) https://doi.org/10.1117/12.179180
Event: OE/LASE '94, 1994, Los Angeles, CA, United States

Abstract

Epitaxial multilayer thin films of SrCuO₂/(Sr,Ca)CuO₂ and (Sr,Ca)CuO₂/(Sr,Ca)RuO₃ have been prepared on (100) SrTiO₃ single crystal by a multitarget RF magnetron sputtering. The XRD measurements revealed that the heteroepitaxial growth of c-plane of the infinite-layer SrCuO₂ or a-plane of perovskite (Sr,Ca)RuO₃ was confirmed with c-plane of infinite-layer (Sr,Ca)CuO₂ on (100) SrTiO₃ substrate surface. Both multilayer films were successfully constructed as we designed with a minimum layer thickness of 10 angstroms. In the TEM images of the SrCuO₂/(Sr,Ca)CuO₂ multilayer, there existed planar dislocations being parallel to the ac- and bc-planes, crossing the boundaries of SrCuO₂ and (Sr,Ca)CuO₂ layers. On the other hand, TEM measurements of the (Sr,Ca)CuO₂/(Sr,Ca)RuO₃ multilayers indicated that there was no dislocation which exists commonly in the infinite-layer films. Resistivities of multilayer films at room temperature were ranging from 1 to 100 m(Omega) cm and showed semiconductor-like dependence against the temperature.

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Toshifumi Satoh, Hideaki Adachi, Yoko Ichikawa, Kentaro Setsune, and Kiyotaka Wasa "Preparation and microstructure of epitaxial multilayers with infinite layer thin films", Proc. SPIE 2157, Superconducting Superlattices and Multilayers, (29 June 1994); https://doi.org/10.1117/12.179180

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KEYWORDS

Multilayers

Modulation

Thin films

Perovskite

Satellites

Transmission electron microscopy

Diffraction

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