Lateral and vertical dimension measurements by using laser scanning microscopy including an optical heterodyne function

Hiroo Fujita

doi:10.1117/12.215590

2 August 1995 Lateral and vertical dimension measurements by using laser scanning microscopy including an optical heterodyne function

Hiroo Fujita

Author Affiliations +

Proceedings Volume 2576, International Conference on Optical Fabrication and Testing; (1995) https://doi.org/10.1117/12.215590
Event: International Conferences on Optical Fabrication and Testing and Applications of Optical Holography, 1995, Tokyo, Japan

Abstract

A construction of surface profile measurement system for measuring lateral and vertical dimensions of submicron to micron size and its applications to industrial inspection are described. This system includes a laser scanning microscopy (LSM) and an optical heterodyne interferometry (OHI) functions in one and the same optical device. These two functions are used individually depending on the purpose of the measurement. OHI measures vertical dimensions, LSM measures lateral dimensions. The selection of the functions is performed by changing the intensity distribution of the probe light beam falled on a sample and signal processing system of the reflected light beam.

Citation Download Citation

Hiroo Fujita "Lateral and vertical dimension measurements by using laser scanning microscopy including an optical heterodyne function", Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); https://doi.org/10.1117/12.215590

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