Monolithically integrated refractive microlens standing perpendicular to the substrate

Charles King; Lih-Yuan Lin; Ming C. Wu

doi:10.1117/12.234631

8 March 1996 Monolithically integrated refractive microlens standing perpendicular to the substrate

Charles King, Lih-Yuan Lin, Ming C. Wu

Proceedings Volume 2687, Miniaturized Systems with Micro-Optics and Micromechanics; (1996) https://doi.org/10.1117/12.234631
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

We report the first fabrication of a spherical microlens monolithically integrated on a surface- micromachined supporting plate standing perpendicular to the substrate. The focusing and collimating abilities of the lens are successfully demonstrated.

Citation Download Citation

Charles King, Lih-Yuan Lin, and Ming C. Wu "Monolithically integrated refractive microlens standing perpendicular to the substrate", Proc. SPIE 2687, Miniaturized Systems with Micro-Optics and Micromechanics, (8 March 1996); https://doi.org/10.1117/12.234631

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