Monolithic integration of waveguide structures with surface-micromachined polysilicon actuators

James H. Smith; Richard Franklin Carson; Charles T. Sullivan; G. McClellan

doi:10.1117/12.240431

20 May 1996 Monolithic integration of waveguide structures with surface-micromachined polysilicon actuators

James H. Smith, Richard Franklin Carson, Charles T. Sullivan, G. McClellan

Proceedings Volume 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS; (1996) https://doi.org/10.1117/12.240431
Event: 1996 Symposium on Smart Structures and Materials, 1996, San Diego, CA, United States

Abstract

The integration of optical components with polysilicon surface micromechanical actuation mechanisms shows significant promise for signal switching, fiber alignment, and optical sensing applications. Monolithically integrating the manufacturing process for waveguide structures with the processing of polysilicon actuators allows actuated waveguides to take advantage of the economy of silicon manufacturing. The optical and stress properties of the oxides and nitrides considered for the waveguide design along with design, fabrication, and testing details for the polysilicon actuators are presented.

Citation Download Citation

James H. Smith, Richard Franklin Carson, Charles T. Sullivan, and G. McClellan "Monolithic integration of waveguide structures with surface-micromachined polysilicon actuators", Proc. SPIE 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS, (20 May 1996); https://doi.org/10.1117/12.240431

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