TiSix as a new embedded material for attenuated phase-shift mask

Wen-An Loong; Tzu-ching Chen; Shyi-Long Shy; Jin-chi Tseng; Ren-Jang Lin

doi:10.1117/12.240969

7 June 1996 TiSix as a new embedded material for attenuated phase-shift mask

Wen-An Loong, Tzu-ching Chen, Shyi-Long Shy, Jin-chi Tseng, Ren-Jang Lin

Proceedings Volume 2726, Optical Microlithography IX; (1996) https://doi.org/10.1117/12.240969
Event: SPIE's 1996 International Symposium on Microlithography, 1996, Santa Clara, CA, United States

Abstract

In this paper, TiSix as a new material suitable for using as an embedded layer for an attenuated phase shift mask (APSM) is presented. TiSix thin film was formed by plasma sputtering under Ar gas of 26 sccm. The related characteristics of TiSix at 365 nm (i-line) wavelength are as follows: n (refractive index) approximately 3.6; k (extinction coefficient) approximately 1.2; R percent (reflection) approximately 36, (rho) (resistivity 1.0 approximately 8.3 (mu) (Omega) -cm (depends on substrate). For required phase shift degree (theta) equals 180 degrees, calculated thickness d₁₈₀ is 3.6 which is suitable for APSM. T percent under visible wavelength at thickness d₁₈₀ is 14 approximately 17 which is suitable for mask's alignment by laser beam. TiSix film has good electrical conductivity, therefore, suitable for e-beam direct-write in patterning mask. TiSix film is also highly resistant to strong acid, suitable for fabrication of mask.

Citation Download Citation

Wen-An Loong, Tzu-ching Chen, Shyi-Long Shy, Jin-chi Tseng, and Ren-Jang Lin "TiSix as a new embedded material for attenuated phase-shift mask", Proc. SPIE 2726, Optical Microlithography IX, (7 June 1996); https://doi.org/10.1117/12.240969

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available