Equivalent wavelength interferometry using diffractive optics

Peter J. de Groot

doi:10.1117/12.250773

18 September 1996 Equivalent wavelength interferometry using diffractive optics

Peter J. de Groot

Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250773
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

When two beams of an interferometer are directed to the same object at different incident angles, the recombined, reflected beams generate an interference pattern with a large equivalent wavelength. This paper reviews the basic principles of these `desensitized' interferometers, and describes a novel diffractive geometry that is particularly well adapted to manufacturing applications, thanks to its large working distance, achromatism and high accuracy.

Citation Download Citation

Peter J. de Groot "Equivalent wavelength interferometry using diffractive optics", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); https://doi.org/10.1117/12.250773

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