Scatterometry for machine vision

Jerry Volcy; Stephen L. Dickerson

doi:10.1117/12.256308

29 October 1996 Scatterometry for machine vision

Jerry Volcy, Stephen L. Dickerson

Proceedings Volume 2904, Intelligent Robots and Computer Vision XV: Algorithms, Techniques,Active Vision, and Materials Handling; (1996) https://doi.org/10.1117/12.256308
Event: Photonics East '96, 1996, Boston, MA, United States

Abstract

Specifications and design are provided for a low-cost scatterometer build to study the relationship between optical scatter and image formation. Design principles and considerations are discussed as they relate to digital imaging. Specifications and instrument limitations both mechanical and optical are examined and certain design choices are explained. The process of calibrating the instrument is considered and methods of noise suppression both electronic and optical are discussed. Finally, some measured data is presented.

Citation Download Citation

Jerry Volcy and Stephen L. Dickerson "Scatterometry for machine vision", Proc. SPIE 2904, Intelligent Robots and Computer Vision XV: Algorithms, Techniques,Active Vision, and Materials Handling, (29 October 1996); https://doi.org/10.1117/12.256308

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