Deposition of YBCO thin film with buffer layer by unbalanced magnetron sputtering

Chunaeni Latief; M. Barmawi

doi:10.1117/12.300667

20 February 1998 Deposition of YBCO thin film with buffer layer by unbalanced magnetron sputtering

Chunaeni Latief, M. Barmawi

Proceedings Volume 3175, Third International Conference on Thin Film Physics and Applications; (1998) https://doi.org/10.1117/12.300667
Event: Third International Conference on Thin Film Physics and Applications, 1997, Shanghai, China

Abstract

YBCO thin film with strontium titanate buffer layer has been made by using unbalanced magnetron sputtering (UMS). It has been shown experimentally that resputtering effect, usually takes place in balanced magnetron sputtering and glow discharge sputtering is suppressed. It turns out that the critical temperature as well as the critical current is improved.

Citation Download Citation

Chunaeni Latief and M. Barmawi "Deposition of YBCO thin film with buffer layer by unbalanced magnetron sputtering", Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); https://doi.org/10.1117/12.300667

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