Integrated uncooled array IR sensors

Eugeny Ph. Pevtsov; Eugeny G. Elkin; Marina A. Pospelova

doi:10.1117/12.284744

11 August 1997 Integrated uncooled array IR sensors

Eugeny Ph. Pevtsov, Eugeny G. Elkin, Marina A. Pospelova

Proceedings Volume 3200, Third Conference on Photonic Systems for Ecological Monitoring; (1997) https://doi.org/10.1117/12.284744
Event: Third Conference on Photonic Systems for Ecological Monitoring, 1996, Prague, Czech Republic

Abstract

Technologies enabling low-dissipation designs for uncooled array IR sensors are offered. The technique involves the etching of special buffer layers from under a 1-micrometers membrane followed by deposition of an IR-sensitive film and electrode structure. The electrical and physical properties of plumbum-zirconate-titanate, barium titanate, tetraaminodiphenyl, polyvinylidene fluoride pyroelectric films are compared. A circuit for sensing pyroelectric signals in a CCD is considered.

Citation Download Citation

Eugeny Ph. Pevtsov, Eugeny G. Elkin, and Marina A. Pospelova "Integrated uncooled array IR sensors", Proc. SPIE 3200, Third Conference on Photonic Systems for Ecological Monitoring, (11 August 1997); https://doi.org/10.1117/12.284744

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