Microwork transfer system in a nanomanufacturing world

Kensuke Tsuchiya; Masayuki Nakao; Takenori Okusa; Yotaro Hatamura; Kiyoshi Matsumoto

doi:10.1117/12.298032

1 January 1998 Microwork transfer system in a nanomanufacturing world

Kensuke Tsuchiya, Masayuki Nakao, Takenori Okusa, Yotaro Hatamura, Kiyoshi Matsumoto

Proceedings Volume 3202, Microrobotics and Microsystem Fabrication; (1998) https://doi.org/10.1117/12.298032
Event: Intelligent Systems and Advanced Manufacturing, 1997, Pittsburgh, PA, United States

Abstract

Practical micromachines, such as magnetic heads or endoscopic tools, can not be made only by shaping processes; they require post-machining processes such as assembling, wiring, piping, etc. The authors have developed an integrated manufacturing system, 'nano manufacturing world' (NMW). It performs shaping, post-machining or transferring like a factory. In this paper, we introduce a microwork transfer system, which functions a) steady transfer of a workpiece, b) non-release chucking of the workpiece during production and c) individual rotation of the workpiece using a preloaded microslide bearing on the pallet. Developed transfer system could realize the functions: less positioning error due to accurate pallet positioning by taper pins, high transfer yield of the workpieces due to no missing by a micro chuck, sub-micron rotational fluctuation due to a roller pallet by a preloaded micro slide bearing. Through the fabrication demonstrations of a sub-1 mm³ micro-house or micro force sensor block of 125 X 100 X 500 micrometers , it has been confirmed that this transfer system improved the performance of integrated manufacturing in NMW.

Citation Download Citation

Kensuke Tsuchiya, Masayuki Nakao, Takenori Okusa, Yotaro Hatamura, and Kiyoshi Matsumoto "Microwork transfer system in a nanomanufacturing world", Proc. SPIE 3202, Microrobotics and Microsystem Fabrication, (1 January 1998); https://doi.org/10.1117/12.298032

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