Industrial applications of pulsed lasers to materials microprocessing

Malcolm C. Gower

doi:10.1117/12.321564

14 September 1998 Industrial applications of pulsed lasers to materials microprocessing

Malcolm C. Gower

Proceedings Volume 3343, High-Power Laser Ablation; (1998) https://doi.org/10.1117/12.321564
Event: High-Power Laser Ablation, 1998, Santa Fe, NM, United States

Abstract

The use of pulsed lasers for microprocessing material in several manufacturing industries is presented. Deep-uv photolithography, via hole and ink jet printer nozzle microdrilling, solar panel thin film scribing, texturing of hard disks, annealing amorphous silicon in flat panel displays, fiber Bragg grating production and micro-electro- mechanical system (MEMS) fabrication applications are discussed.

Citation Download Citation

Malcolm C. Gower "Industrial applications of pulsed lasers to materials microprocessing", Proc. SPIE 3343, High-Power Laser Ablation, (14 September 1998); https://doi.org/10.1117/12.321564

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