Pulsed laser deposition: prospects for commercial deposition of epitaxial thin films

Ross E. Muenchausen

doi:10.1117/12.321616

14 September 1998 Pulsed laser deposition: prospects for commercial deposition of epitaxial thin films

Ross E. Muenchausen

Proceedings Volume 3343, High-Power Laser Ablation; (1998) https://doi.org/10.1117/12.321616
Event: High-Power Laser Ablation, 1998, Santa Fe, NM, United States

Abstract

In this paper we briefly define pulsed laser deposition, current applications, research directed at gaining a better understanding of the pulsed laser deposition process, and suggest some future directions to enable commercial applications.

Citation Download Citation

Ross E. Muenchausen "Pulsed laser deposition: prospects for commercial deposition of epitaxial thin films", Proc. SPIE 3343, High-Power Laser Ablation, (14 September 1998); https://doi.org/10.1117/12.321616

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